WAFER POSITIONING RETAINER

摘要

PURPOSE:To align different-sized wafers easily with one another by a method wherein throughholes are made in the positions corresponding to respective wafer sizes of several different kinds to make positioning of wafers by means of inserting pin members into specified throughholes corresponding to the different size. CONSTITUTION:Pinplate 90 planted with six each of positioning pins 20 is prepared for each wafer size of 4-6 inches to be fastened tight to a lifting plate 92 free-removably. A wafer is conveyed to a turning disc 12 by a conveyer belt 16. Then at the time point when the rear end of wafer is passing through the end of turning disc 12, the air for shifting wafer is jetting from nozzles 54; pushers 24 are simultaneously pushed controlling the positions thereof to situate the ends of protrusions 24A at the positions slightly outside the outermost dummy throughholes 58. The wafer 14 shifted by air collides with the positioning pins 20 so that the reaction may be blocked by the ends of protrusions 24A to make the center of wafer 14 align with the center of turning disc 12 within relatively short time for positioning.