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经营范围
发明名称
APPARATUS FOR EVALUATING INTEGRATED CIRCUIT
摘要
申请公布号
JPS6270774(A)
申请公布日期
1987.04.01
申请号
JP19850210114
申请日期
1985.09.25
申请人
TOSHIBA CORP
发明人
HIRABAYASHI KANJI
分类号
H01L21/66;G01N23/225;G01R31/28;G01R31/302
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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