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发明名称
ION SOURCE WITH EVAPORATION FURNACE
摘要
申请公布号
JPS6271147(A)
申请公布日期
1987.04.01
申请号
JP19850210002
申请日期
1985.09.25
申请人
HITACHI LTD
发明人
TAYA TOSHIMICHI
分类号
H01J27/16;H01J37/08
主分类号
H01J27/16
代理机构
代理人
主权项
地址
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