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发明名称
SAMPLE STAGE FOR ELECTRON MICROSCOPE
摘要
申请公布号
JPS6271157(A)
申请公布日期
1987.04.01
申请号
JP19850211527
申请日期
1985.09.24
申请人
NEC CORP
发明人
KAMESHIMA YASUBUMI
分类号
H01J37/20
主分类号
H01J37/20
代理机构
代理人
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