发明名称 Infrared sensitive silicon substrate with integrated electronic processing devices and method for producing same
摘要 An integrated circuit arrangement including an infrared sensitive silicon substrate having an epitaxial layer with integrated electronic processing devices applied to the major surface thereof, wherein the epitaxial layer is partially etched away to expose the detector region of the substrate. The exposed detector region is then connected to the processing devices by either a shallow diffusion or by other means. A method for producing such an arrangement, preferably using a crystal orientation dependent etching medium for etching the epitaxial layer, is also disclosed.
申请公布号 US4652901(A) 申请公布日期 1987.03.24
申请号 US19810346730 申请日期 1981.10.06
申请人 LICENTIA PATENT-VERWALTUNGS-GMBH 发明人 NOTHAFT, PETER
分类号 H01L27/148;H01L31/18;(IPC1-7):H01L27/02 主分类号 H01L27/148
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