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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPS6265377(A)
申请公布日期
1987.03.24
申请号
JP19850204216
申请日期
1985.09.18
申请人
HITACHI LTD
发明人
HATTA YASUSHI
分类号
H01L29/812;H01L21/338;H01L27/095;H01L29/80
主分类号
H01L29/812
代理机构
代理人
主权项
地址
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