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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6263463(A)
申请公布日期
1987.03.20
申请号
JP19850203827
申请日期
1985.09.13
申请人
NEC CORP
发明人
KUWATA TAKAAKI
分类号
H01L27/04;H01L21/822;H01L29/78
主分类号
H01L27/04
代理机构
代理人
主权项
地址
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