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发明名称
SPEKTROSKOPISCHES VERFAHREN ZUR IN SITU OPTIMIERUNG UND ENDPUNKTSBESTIMMUNG BEI PLASMAAETZPROZESSEN
摘要
申请公布号
DD244018(A1)
申请公布日期
1987.03.18
申请号
DD19850283614
申请日期
1985.12.03
申请人
HUMBOLDT-UNIVERSITAET ZU BERLIN,DD
发明人
REHAK,WOLFGANG,DD;PROESCH,ULLRICH,DD;GLAENZEL,ALBRECHT,DD;PLOSS,WOLFGANG,DD
分类号
C23C14/34;G01N21/31;H01L21/302;(IPC1-7):H01L21/302
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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