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发明名称
SINGLE-CRYSTAL FILM OF SILICON CALCIUM FLUORIDE MIXED CRYSTAL AND FORMING METHOD THEREOF
摘要
申请公布号
JPS6261344(A)
申请公布日期
1987.03.18
申请号
JP19850199346
申请日期
1985.09.11
申请人
OKI ELECTRIC IND CO LTD
发明人
SASAKI MASAYOSHI
分类号
H01L21/205;H01L21/314;H01L21/84;H01L27/12
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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