METHOD FOR FORMING PARTICLES BY SPUTTERING,申请号JP19850199041-传众专利搜索

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发明名称	METHOD FOR FORMING PARTICLES BY SPUTTERING
摘要
申请公布号	JPS6261601(A)	申请公布日期	1987.03.18
申请号	JP19850199041	申请日期	1985.09.09
申请人	YATANI SHIGEKI;YAMAUCHI KENJI;MIHAMA KAZUHIRO	发明人	YATANI SHIGEKI;YAMAUCHI KENJI;KAMAKURA TAKANOBU;MIHAMA KAZUHIRO
分类号	B22F9/14;B01D7/00	主分类号	B22F9/14
代理机构		代理人
主权项
地址

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