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发明名称
摘要
申请公布号
JPS6244449(U)
申请公布日期
1987.03.17
申请号
JP19850135580U
申请日期
1985.09.04
申请人
发明人
分类号
H01L21/822;G06F15/02;H01L27/04;H01L31/04;H01L31/042;(IPC1-7):H01L27/04
主分类号
H01L21/822
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