VAPOR-PHASE EPITAXIAL GROWTH EQUIPMENT,申请号JP19850198232-传众专利搜索

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发明名称	VAPOR-PHASE EPITAXIAL GROWTH EQUIPMENT
摘要
申请公布号	JPS6258641(A)	申请公布日期	1987.03.14
申请号	JP19850198232	申请日期	1985.09.06
申请人	FUJITSU LTD	发明人	MARUYAMA KENJI
分类号	H01L21/205;H01L21/365	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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