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发明名称
PROBER
摘要
申请公布号
JPS6258651(A)
申请公布日期
1987.03.14
申请号
JP19850198918
申请日期
1985.09.09
申请人
TOSHIBA CORP
发明人
ETO HISAHIKO
分类号
H01L21/66;H01L21/304
主分类号
H01L21/66
代理机构
代理人
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