HEAT TREATMENT DEVICE,申请号JP19850198072-传众专利搜索

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发明名称	HEAT TREATMENT DEVICE
摘要
申请公布号	JPS6258618(A)	申请公布日期	1987.03.14
申请号	JP19850198072	申请日期	1985.09.06
申请人	MATSUSHITA ELECTRIC IND CO LTD	发明人	SHITSUPOU OSAMU
分类号	H01L21/673;H01L21/22;H01L21/322;H01L21/324;H01L21/67;H01L21/68	主分类号	H01L21/673
代理机构		代理人
主权项
地址

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