| 摘要 |
PURPOSE:To obtain a laser tube of long service life in which temperature rise of each part is small and impure gas generation is scarce, by constituting laser capillary using a plurality of laser capillary constituting members composed of cylindrical part member, a plurality of metal plates and disk type bulkhead members. CONSTITUTION:In a cylindrical outer tube 1, a plurality of laser capillary constituting members 2 which constitute the laser capillary are inserted to constitute the ion laser tube. Laser capillary constituting members 2 are composed of a cylindrical part member 7 provided with a penetrating hole 6 to constitute a laser capillary part, a plurality of metal plates 8 which are radially arranged on the outer surface of the cylindrical part member 7, being inscribed with an enclosure 1, and hold the cylindrical part member 7 on the axis of the enclosure 1 and disk type bulkhead 10 which has a center hole to engage with the end-peripheral part of the cylindrical part member 7 and a plurality of penetrating small holes 9 made on a concentric circle of the center hole. A metal of high sputtering resistance such as tungsten or ceramics of high thermal conductivity such as SiC, AlN, etc. is suitable for the material of the cylindrical part member 7. |
