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发明名称
MINUTE-PATTERN FORMING METHOD
摘要
申请公布号
JPS6257221(A)
申请公布日期
1987.03.12
申请号
JP19850197977
申请日期
1985.09.06
申请人
MITSUBISHI ELECTRIC CORP
发明人
OZAKI KATSUYA;AONO KOJI;OSAWA MASARU;MATSUOKA TAKASHI
分类号
H01L21/3205;H01L21/302
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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