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发明名称
FORMATION OF LIGHT-EXCITED THIN FILM
摘要
申请公布号
JPS6256571(A)
申请公布日期
1987.03.12
申请号
JP19850197019
申请日期
1985.09.05
申请人
NEC CORP
发明人
YOKOYAMA HIROYUKI
分类号
C23C16/48
主分类号
C23C16/48
代理机构
代理人
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地址
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