| 摘要 |
PURPOSE:To facilitate the sticking of a wafer and the observation of film growth on the wafer by arranging an adhesion preventive plate preventing an adhesion on the surface of a material for growing a film on a molybdenum block and forming a wafer sticking section on the molybdenum block to a base shape in the direction of a molecular-beam incident window. CONSTITUTION:An adhesion preventive plate 19 has a molecular-beam incident window 21 formed made to correspond to a wafer sticking section 22 on a molybdenum block 13, and covers the surface 14 of the molybdenum block 13 except the wafer sticking section 22 and prevents an adhesion on the surface of a material for growing a film projected in a form of molecular beams. With the molybdenum block 13, the wafer sticking section 22 is projected and formed to a base shape in the direction of the molecular-beam incident window 21, and the surface of the wafer 2 is positioned on the side upper than the surface of the adhesion preventive plate 19 when the water 2 is stuck to the base-shaped wafer sticking section 22. Accordingly, the state of film growth on the wafer 2 can be observed easily while the wafer 2 can also be stuck to the molybdenum block 13 easily. |
