VAPOR GROWTH APPARATUS,申请号JP19850189667-传众专利搜索

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发明名称	VAPOR GROWTH APPARATUS
摘要
申请公布号	JPS6251209(A)	申请公布日期	1987.03.05
申请号	JP19850189667	申请日期	1985.08.30
申请人	HITACHI LTD;HITACHI CABLE LTD	发明人	SAKAGUCHI HARUNORI;ONO YUICHI;HIRUMA TAKEYUKI
分类号	H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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