| 摘要 |
PURPOSE:To increase the substrate reinforcing effect of an antireflection film and the antireflection effect in the visible light region independently of the kind of plastic substrate by forming a multilayered antireflection film having a specified composition of a plastic substrate. CONSTITUTION:A multilayered antireflection film is formed on a plastic substrate 1 by successively laminating an SiO film as the 1st layer of 0.13lambda-lambda optical thickness (lambda is the wavelength of light), an SiO2 film as the 2nd layer 3 of 0.13lambda-lambda thickness, a film of Al2O3, SiO or a mixture of them or a multilayered film consisting of them as the 3rd layer 4 of 0.36lambda-0.44lambda thickness, a film of ZrO2, CeO2 or a mixture of them or a multilayered film consisting of them as the 4th layer 5 of 0.18lambda-0.22lambda thickness, a film of SiO2, MgF2 or a mixture of them or a multilayered film consisting of them as the 5th layer 6 of 0.33lambda-0.04lambda thickness, a film of Ta2O5, TiO, TiO2 or a mixture of two or more among them or a multilayered film consisting of them as the 6th layer 7 of 0.22lambda-0.27lambda thickness, and a film of SiO2, MgF2 or a mixture of them or a multilayered film consisting of them as the 7th layer 8 of 0.24lambda-0.30lambda thickness. By this structure, a substrate reinforcing effect and a significant antireflection effect in the visible light region are produced, and the structure is applied to a camera, a copying machine or the like. |
