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发明名称
摘要
申请公布号
JPS6234431(U)
申请公布日期
1987.02.28
申请号
JP19850126159U
申请日期
1985.08.19
申请人
发明人
分类号
H01L21/60;(IPC1-7):H01L21/60
主分类号
H01L21/60
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代理人
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