| 摘要 |
PURPOSE:To make almost no difference in size between the fine patterns formed in the first exposure and those formed in the second and subsequent exposures by a method wherein the exposing energy used in the second and subsequent exposures is made lower than the exposing energy of the first exposure using the photomask whereon a contrast emphasizing film is coated. CONSTITUTION:When a transmitted light is made incident on a CEL (contrast emphasizing film) 2, a bleaching action is generated corresponding to the intensity of the transmitted light, transmission factor becomes larger in a bleached region 6, the transmission factor becomes small in a non-bleached region 7 due to the feebleness of the transmitted light, and the contrast of the transmitted light of a photomask 1 is improved remarkably. At this point, when an exposure is performed continuously on a plurality of substrates or chips using the same exposing energy, the non-bleached region 67 of the CEL 2 is reduced in size every time an exposure is performed, and the effect of CEL goes out. In order to suppress the bleaching of the non-bleached region 7, the exposing energy used in the second and subsequent exposure is made lower than that used in the first exposure. |
