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发明名称
摘要
申请公布号
JPS6226027(U)
申请公布日期
1987.02.17
申请号
JP19850116577U
申请日期
1985.07.31
申请人
发明人
分类号
C30B25/12;H01L21/203;H01L21/26;(IPC1-7):H01L21/203
主分类号
C30B25/12
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