摘要 |
PURPOSE:To execute the optical linkage of the light emitting photodetecting element and an optical waveguide efficiently by forming the lens at the prescribed position of the surface at the side opposite to the substrate of the optical waveguide. CONSTITUTION:In the circuit of an optical waveguide 1 formed on a substrate 2, a lens 3 is formed at the prescribed position of the surface of the optical waveguide 1 at the side opposite to the substrate 2 of the optical waveguide 1. Namely, the light to proceed in the optical waveguide 1 is changed in the proceeding direction by a mirror M, proceeded in the vertical direction to the substrate 2 and made incident on the lens 3. The light made incident on the lens 3 is the divergent light to speed and proceed by the angle determined by the number of the aperture of the optical waveguide 1 and the incident conditions of the light to the optical waveguide 1, and taken out to the space at the upper side of the optical waveguide 1 almost as the parallel light or the focusing light by the lens 3. Thus, the waveguide 1 can be efficiently linked to a photodetecting element 4 provided at the upper part of the lens 3. |