| 摘要 |
<p>A method of and apparatus for machining a workpiece (2), such as ceramic, with an energy beam (B), e.g. a beam of energetic ions or laser beam, produced by a beam generator (1). A carriage (3), having the workpiece securely mounted thereon, and the beam generator are relatively displaced to cause the beam to move in a scanning manner along a prescribed path on the workpiece surface. An acoustic emission from the workpiece being machined is sensed by a transducer (7) disposed in contact therewith to provide a control signal which is applied to the generator for controlling the energy or energy density of the beam and!or to a drive unit for displacing the workpiece relative to the beam generator to control the rate of relative scanning displacement between the energy beam and the workpiece.</p> |
