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发明名称
ASSEMBLING EQUIPMENT FOR SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6232621(A)
申请公布日期
1987.02.12
申请号
JP19850171772
申请日期
1985.08.06
申请人
TOSHIBA CORP
发明人
INOUE KAZUO;KACHI KAZUO
分类号
B23P21/00;B25J5/00;B65G37/00;H01L21/50
主分类号
B23P21/00
代理机构
代理人
主权项
地址
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