| 摘要 |
PURPOSE:To detect weak light emitted from a sample, by arranging a sample stage so that the projecting direction of an electron beam to the sample is different from the radiating direction of the electron beam. CONSTITUTION:An electron beam, which is generated from a filament 4, is accelerated by a high potential between the filament and an anode plate 8 and deflected toward a sample stage 20 by a deflecting means 22. The deflected electron beam is converged through a converging lens 10, an aperture 12, an objective lens 16 and the like. The electron beam is projected on a sample 18. The light, which is excited and emitted from the sample, is reflected by a reflecting mirror 14 and guided to a spectroscope. The light, which is divided in the spectroscope and has a specified wavelength, is detected by a detector. Meanwhile, the light, which is emitted from the same filament 4, is projected in the direction of an arrow A straightly without deflection to the side of the stage 20. Therefore, the input of the stray light emitted from the filament 4 into the spectroscope is prevented. |
