| 摘要 |
<p>A quartz pressure transducer (10) is disclosed which includes diaphragms (14,16,18) having deposited metal layers (20,22,24,26,32,34) on both sides thereof. Since the layers are all on the diaphragms, the sensor disclosed herein is highly resistant to errors caused by changes in temperature, while retaining excellent resistance to errors caused by acceleration or vibration forces. The transducer may be constructed as either an absolute pressure sensor or as a differential pressure sensor, and in the primary embodiment contains a reference capacitance which may be used by appropriate electronic circuitry toprovide compensation for acceleration or vibration forces, making the output of the pressure transducer a highly accurate, highly sensitive indication of pressure sensed. </p> |
