| 摘要 |
PURPOSE:To obtain a three-dimensional data concerning the solid part such as electronic parts with a simple constitution by obtaining the three-dimensional data of the electronic parts by the plane information and the height information by the laser beam irradiation. CONSTITUTION:A pattern recognizing device 4 calculates a displacement in the X direction and Y direction of electronic parts 1a, etc., and outputs a plane signal ps which is a two-dimensional information. A height calculating device 5, for example, calculates the height of the electronic parts 5, for example, calculates the height of the electronic parts 1a from the time difference of a signal t1 at the time of the irradiation of the laser beam, a signal t2 at the time of the receiving of the laser reflecting beam from the electronic parts 1a and a signal t3 at the time of the receiving of the laser reflecting beam from a substrate 1, and outputs the height signal hs of one-dimensional information. A signal processing part inputs respectively the plane signal ps of the plane information and the height signal hs of the height information, generally processes, and for example, outputs the three-dimensional data 3d of the electronic parts 1a. |
