| 摘要 |
PURPOSE:To improve the bonding strength by providing sufficient temperature condition with an auxiliary heating means for pellet at the time of pellet bonding. CONSTITUTION:A pellet 16 is contained in the pocket 17 of an adjustment jig 6, and the position of it is adjusted. At that time, the pellet is heated with a heater 18 provided on the lower layer of the pocket 17. If not only the substrate 8 but also the pellet 16 are preheated at the time of the bonding, no failure in bonding due to the insufficient wetting accompanying insufficient temperature is produced, thereby sufficiently maintaining the bonding strength between the pellet 16 and the substrate 8. |
