DIMENSION MEASURING INSTRUMENT,申请号JP19850158152-传众专利搜索

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发明名称	DIMENSION MEASURING INSTRUMENT
摘要
申请公布号	JPS6219706(A)	申请公布日期	1987.01.28
申请号	JP19850158152	申请日期	1985.07.19
申请人	HITACHI LTD	发明人	TANABE YOSHIKAZU;ISHIKAWA KATSUHIKO;TAKAMOTO KENJI
分类号	G01B15/00;G01B15/02;H01L21/66	主分类号	G01B15/00
代理机构		代理人
主权项
地址

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