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发明名称
THIN FILM FORMING DEVICE
摘要
申请公布号
JPS6217176(A)
申请公布日期
1987.01.26
申请号
JP19850157720
申请日期
1985.07.17
申请人
FUJI PHOTO FILM CO LTD
发明人
KAWADA KEN;HONDA KUNIHIKO
分类号
C23C14/56;G11B5/85
主分类号
C23C14/56
代理机构
代理人
主权项
地址
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