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发明名称
IONE-IMPLANTERING MED BRUK AV ALKALI ELLER JORDALKALIE METALL TETRAFLUOROBORAT SOM BORIONE-KILDE.
摘要
申请公布号
NO870194(D0)
申请公布日期
1987.01.16
申请号
NO19870000194
申请日期
1987.01.16
申请人
AIR PRODUCTS AND CHEMICALS INC
发明人
LANGENDIJK, ANDRE;RIAHI, SHANTIA
分类号
H01J37/317;C30B31/22;H01L21/265;(IPC1-7):H01L/
主分类号
H01J37/317
代理机构
代理人
主权项
地址
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