| 摘要 |
PURPOSE:To obtain a small-sized, efficient device by using one mechanism to convey a substrate onto an exposing machine by a conveying machine and press and fixing the substrate as it is, and then to expose and convey the substrate. CONSTITUTION:The carrier 5 of the conveying machine 30 moves onto the substrate 2 which is maintained by a throwing-in machine 1 at specific height and the substrate is lifted by a sucker 6 for conveyance and moved as shown by an arrow E onto the glass plate 10 of an exposure part, thereby placing the substrate on the glass plate 10 at a specific position. When vacuum suction is carried out through a suction hole 80 by a vacuum device provided to the exposure part, a soft film 40 deforms along the substrate 2, sucker 6 for conveyance, and packing 70 to contact the substrate 2, which is fixed. Then, light from a light source 12 reaches the substrate 2 through the glass plate 10 of the exposure part and the substrate is exposed to a circuit pattern drawn on the glass plate 10. The vacuum suction is carried on even after the exposure to lift the substrate 2 by the sucker 6 for conveyance and the carrier 5 is moved right onto a receiving machine 13 and the suction of the sucker 6 for conveyance is released to place the substrate 2 on the receiving machine 13, thus completing the exposure. |
