发明名称 |
Device for the optical measurement of the edge to edge dimension of an object |
摘要 |
Optical device forms a magnified image of the object to be measured. A photosensitive member constituted by a sequence of photosensitive elements is arranged in the image plane. An analog-digital converter is connected to the photosensitive member and a digital processing circuit performs a discrete Fourier transformation and determines the value N of the first minimum of the spectrum obtained or the mean variation N between minima. The sought dimension L of the object to be measured is obtained by the relation L=X/N, in which X is a parameter defined by the operating conditions.
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申请公布号 |
US4636639(A) |
申请公布日期 |
1987.01.13 |
申请号 |
US19840634542 |
申请日期 |
1984.07.26 |
申请人 |
GUILLAUME, MICHEL E.;NOAILLY, NICOLE |
发明人 |
GUILLAUME, MICHEL E.;NOAILLY, NICOLE |
分类号 |
G01B11/02;(IPC1-7):G01B11/02;G01B11/08 |
主分类号 |
G01B11/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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