| 摘要 |
PURPOSE:To enable the adjustment of the irradiation position of a beam while a sputtering beam is being radiated, by arranging a rod made of material easy to ionize piercing the center of columnar body made of hard to ionize material while a material layer is formed on the side and bottom thereof. CONSTITUTION:A metal rod 1 is buried into a columnar insulating resin 2 to form a jig, which is loaded into a metal sample holder 4. Then, a metal layer 3 is formed on the side and the bottom of the resins 2. The holder 4 is connected to an ammeter 5. center 7 of electron beam for analysis is set to the center of the metal rod 1 and a sputter beam 6 is adjusted to maximize the pointer of the ammeter 5. This enables the adjustment of the irradiation position with the beam while the sputter beam is being irradiated. |
