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发明名称
TREATMENT APPARATUS
摘要
申请公布号
JPS624324(A)
申请公布日期
1987.01.10
申请号
JP19850142485
申请日期
1985.07.01
申请人
HITACHI LTD;KINMON SEISAKUSHO:KK
发明人
TAKAGAKI TETSUYA;UCHINO TOSHIYUKI;ONODA HAJIME;HATTORI KEN
分类号
H01L21/31;H01L21/316
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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