| 摘要 |
PURPOSE:To obtain an electrophotographic sensitive body having superior and stable electrical and optical characteristics, superior electrostatic charging characteristics and low residual potential by laminating layers of microcrystalline silicon and amorphous silicon to form a photoconductive layer. CONSTITUTION:This electrophotographic sensitive body has a photoconductive layer having a three-layered structure consisting of the 1st, the 2nd and the 3rd photoconductive layers 5, 7, 9. The 1st and the 3rd photoconductive layers 5, 9 are made of microcrystalline silicon and the 2nd photoconductive layer 7 is made of amorphous silicon. When the microcrystalline silicon layers are formed, gaseous silane used to form a conventional amorphous silicon layer is used as a gaseous starting material, and microcrystalline silicon is deposited on a support by a high frequency glow discharge decomposition method. The formation of the microcrystalline silicon layers is facilitated by keeping the support at a higher temp. and applying higher frequency power as compared with the formation of the amorphous silicon layer. |
