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发明名称
RESIST-REMOVING DEVICE
摘要
申请公布号
JPS622621(A)
申请公布日期
1987.01.08
申请号
JP19850141738
申请日期
1985.06.28
申请人
NEC CORP
发明人
SUGITO SHIGEYUKI;IGAWA EIJI
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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