| 摘要 |
PURPOSE:To better the accuracy in a beam converging position and to perform a good work by detecting the instantaneous current value difference of a deflecting coil and by finding the work distance automatically in the minimum point of the reflecting secondary energy of the seam crossing electron beam at the fixed quantity moving time of a welding work piece. CONSTITUTION:The beam 3 emitted from an electron gun 2 welds the seam of a work piece 4 with vibrating by a deflecting coil 6 by being converged by a converging coil 5. The work piece 4 is moved by a fixed quantity DELTA by motors 51, 52 by operating a NC driving control device 55 with the system control device 65. On the other hand, the reflecting secondary energy 9 is caught by a collector 8 and after removing the noise by a filter 31 the peak value is detected by the trigger generating part in the signal of a gate circuit 32, the deflecting coil instantaneous current value and the difference DELTAi before and after the movement thereof are detected by a sample holding part 20 and the work distance l is obtd. based on the equation. The beam work of good working accuracy is performed by correcting the beam converging position by the work distance l thereof.
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