| 摘要 |
PROBLEM TO BE SOLVED: To provide an image quality inspection device equipped with a means for outputting support information for executing efficiently a parameter tuning work for defect determination by a user. SOLUTION: In this image quality inspection device, an inspection object plane is photographed, and a defect on the plane is inspected based on a determination value set as a determination parameter to be tuned, and a characteristic quantity data file is created relative to each inspection object. The device is equipped with a parameter setting support means for inputting the characteristic quantity data file and the determination value and outputting information for supporting tuning. COPYRIGHT: (C)2005,JPO&NCIPI
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