发明名称 Germanium hardened silicon substrate
摘要 Disclosed is a substitutionally strengthened silicon semiconductor material. A high concentration of germanium atoms is added to a silicon melt to thereby substitutionally displace various silicon atoms throughout the crystalline structure. The germanium atoms, being larger than the silicon atoms, block crystalline dislocations and thus localize such dislocations so that a fault line does not spread throughout the crystalline structure. In heavily boron doped P+ silicon substrates, the larger germanium atoms offset the crystalline shrinkage caused by the boron atoms, thereby equilibrating the silicon crystal size.
申请公布号 US4631234(A) 申请公布日期 1986.12.23
申请号 US19850775885 申请日期 1985.09.13
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 LARRABEE, GRAYDON B.
分类号 C30B29/06;C30B11/00;C30B15/00;C30B15/04;H01L21/18;H01L21/208;H01L29/167;(IPC1-7):H01L21/20 主分类号 C30B29/06
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