发明名称 Integrated circuit having buried oxide isolation and low resistivity substrate for power supply interconnection
摘要 An integrated circuit power supply interconnection technique is disclosed having a highly doped, low resistivity substrate for distribution of the integrated circuit's most positive supply voltage. The substrate functions as the most positive voltage point and accomodates devices that are normally connected directly to this most positive supply voltage. A dielectric buried layer overlies a portion of the substrate and isolates the substrate supply voltage from devices that are not connected directly to the most positive supply voltage.
申请公布号 US4631570(A) 申请公布日期 1986.12.23
申请号 US19840628019 申请日期 1984.07.03
申请人 MOTOROLA, INC. 发明人 BIRRITTELLA, MARK S.;REUSS, ROBERT H.;SEELBACH, WALTER C.
分类号 H01L27/04;H01L21/762;H01L21/822;H01L21/8222;H01L23/528;H01L27/06;H01L27/082;(IPC1-7):H01L27/12;H01L27/02 主分类号 H01L27/04
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