| 摘要 |
PURPOSE:To easily form a wiring board for which light can be applied as a signal medium or driving power source by forming optical transmission lines each consisting of a light transmission part and a light reflection part deposited on the surface thereof on a substrate. CONSTITUTION:Insulating layers 3, 6 consisting of silicon dioxide are deposited and formed by etching atop a chromium layer 2 on an Si substrate 1 and thereafter chromium is deposited over the entire surface and is etched to form the light transmission parts 3, the light reflection parts 4 covering the circumference of the parts 3 and wiring layers 7. The light transmission lines 5 in which the light is used as a signal medium and the wiring layers 7 as the driving power source are thus formed so as to co-exist on the substrate. The wiring board having the fine wirings formed by a lithographic method is applicable to the wiring board of a semiconductor device or electronic apparatus, etc. packaged therewith. |
