| 摘要 |
PURPOSE:To educe the size of a device and to stabilize quality as well as electrical and optical characteristics by providing a substrate supporting cylinder or the like into a reaction vessel which is made to a cylindrical shape and attaching plural pieces of the substrates onto the inside wall surface of the supporting cylinder. CONSTITUTION:The substrate supporting cylinder 2 attached with plural sheets of the substrates 3 is carried into a reaction space A of the hermetically closed reaction vessel 1 and is heated by a heating means 12. On the other hand, a gaseous raw material for forming an active seed is introduced into the pace B of an activation chamber 9 where the active seed is formed. The active seed and the gaseous raw material are supplied via an active seed supply pipe 7 and gaseous raw material supply pipe 6 disposed coaxially with the above- mentioned cylinder 2 into the space A. The deposited films are thus formed on the substrates 3. |
