| 摘要 |
PURPOSE:To obtain a tubular piezoelectric vibrator having an accurate oscillation frequency by applying vapor-deposition from the end face of the tublar piezoelectric vibrator fixed with a piezoelectric vibration chip. CONSTITUTION:An oscillation circuit 8 is connected to supporting plates 3, 3' of the tublar piezoelectric vibrator 1, which is oscillated and a vapor 10 of a metal such as Ag, Au or Al or an insulator from a vapor-deposition source 9 provided toward the end face of the vibrator 1 is vapor-deposited to exciting electrodes 4, 4' of the piezoelectric oscillating chip 6. When the oscillation frequency reaches a setting value, a control circuit 11 moves a shield plate 12 to the vapor-deposition path to complete the vapor-deposition onto the chip 6 and frequency tuning is given to a prescribed oscillation frequency. Further, a mask 13 is placed on a center line of the piezoelectric vibration chip 6 so as to prevent short-circuit of the exciting electrodes 4, 4' on the front and rear sides at vapor deposition.
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