发明名称 SEMICONDUCTOR MEMORY DEVICE
摘要 PURPOSE:To isolate a P channel transistor and an N channel transistor, and to prevent a latch-up effectively by a small area by cutting a groove to the surface of a semiconductor substrate. CONSTITUTION:An insulating film 18 is buried and formed into a groove 15 cut onto a semiconductor substrate 14. In such constitution, an N-P-N type transistor faultily shaped by an N<+> diffusion layer 8, the P-type semiconductor substrate 14 and an N-well 11 is isolated by the groove 15. Accordingly, a latch-up can be prevented without requiring a large area.
申请公布号 JPS61287162(A) 申请公布日期 1986.12.17
申请号 JP19850128837 申请日期 1985.06.13
申请人 MITSUBISHI ELECTRIC CORP 发明人 YASUDA KENICHI;MIYAMOTO HIROSHI;ARIMOTO KAZUTAMI;MASUKO KOICHIRO
分类号 H01L27/108;H01L21/8242;H01L27/08;H01L27/092;H01L27/10;H01L29/78 主分类号 H01L27/108
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