| 摘要 |
PURPOSE:The titled composition, obtained by incorporating specific amounts of a specific polyamic acid with aromatic bisazide compound, amine compound and fluorine-containing organic compound, having good covering properties even when floating dust sticks thereto and suitable for electronic parts, e.g. semiconductor elements, etc. CONSTITUTION:A photosensitive polymer composition obtained by incorporating (A) 100pts.wt. polyamic acid consisting of repeating units expressed by formula I (R<1> is tri- or tetrafunctional organic group; R<2> is bifunctional organic group; n is 1 when R<1> is trifunctional and 2 when R<1> is tetrafunctional) alone or consisting essentially thereof with (B) 0.1-100pts.wt., preferably 0.5-50pts.wt. aromatic bisazide compound expressed by formula II [X is -OH, OR<3> (R<3> is lower alkyl), etc.], (C) 1-400pts.wt. amine compound expressed by formula III (R<5>-R<7> and R<9> are H, etc.; R<8> is alkylene) and (D) 1-500pts.wt. fluorine- containing organic compound expressed by formula IV or V (R<10>-R<12> are H or F; R<13> is H or OH; R<14> is H, etc.; l is an integer 1-15. etc.). |
