发明名称 LASER BEAM SHAPING EQUIPMENT
摘要 PURPOSE:To increase the utilizing efficiency of the beam of a laser beam shaping device by re-utilizing the laser beam passing through an optical fibre by re-reflecting the beam reflected by the wave guide optical system having reflection face and a mask. CONSTITUTION:The laser beam radiated from a laser oscillator 1 is led to an optical fiber 13 by a condenser lens 12. The laser beam is collimated in one direction only by the first cylindrical lens 14, then, the elliptical beam collimated by the second cylindrical lens 15 is radiated on a mask 20 and wave- guided in the rectangular shape accorded with the shape of the mask 20. The beam reflected at the second cylindrical lens 15 side of the mask 20 progresses in the direction of the optical fiber 13 on the almost same light path as the beam making incident on the mask 20, is condensed by the first cylindrical lens 14, reflected by a reflecting mirror 22 and irradiates the mask 20 again.
申请公布号 JPS61286083(A) 申请公布日期 1986.12.16
申请号 JP19850128644 申请日期 1985.06.13
申请人 NEC CORP 发明人 NAKANO MASAKAZU
分类号 B23K26/06 主分类号 B23K26/06
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