发明名称 THIN FILM FORMING DEVICE
摘要 PURPOSE:To form a thin film on the surface of a substrate, having uniform and high quality, by subjecting the cleaned, dried and cooled substrate to painting by a painting roller immersed partly in a thin film forming liquid in a receiving tray and removing the accumulated excess liquid. CONSTITUTION:While the substrate 10 is transferred, the substrate is cleaned, dehydrated and dried. The dried substrate is cooled and transferred by transferring and guiding means in contact only with both sides of the substrate 10 to adjust the substrate to an adequate temp. The substrate is then fed by guide rollers 23 to a paint depositing roller 29 in a paint depositing part 25. The roller 29 is partly immersed in the thin film forming liquid in the receiving tray 26 and is rotated so that the liquid 28 sticks always on the surface thereof. The substrate 10 moves between the roller 29 and a press roller 30 and the liquid 28 is successively coated on the bottom surface thereof. The excess liquid 28 is pushed backward and accumulates on the bottom surface at the rear end of the substrate. The substrate 10 is then fed into a deposited liquid cutting part 32 where the excess liquid 28 is removed by a cutter 35. The substrate is thereafter dried by heating.
申请公布号 JPS61284577(A) 申请公布日期 1986.12.15
申请号 JP19850124223 申请日期 1985.06.10
申请人 FUTABA CORP;IMAI SEISAKUSHO:KK 发明人 NOMURA YUJI;YAMANAKA ISAO;SUZUKI TOSHIYOSHI;IMAI KAZUHIRO;SUZUKI SHINTARO
分类号 G02F1/13;B05C1/02;C23C14/56;C23C14/58;G02F1/133;G02F1/1333;G02F1/1343;H01B13/00;H01S3/038 主分类号 G02F1/13
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